Spectroscopic characterization of phase transformation in Ge-rich Al2O3 films grown by magnetron co-sputtering

Khomenkova, L. and Makasheva, K. and Petrik, Péter and Tsybrii, Z. and Melnichuk, O. (2020) Spectroscopic characterization of phase transformation in Ge-rich Al2O3 films grown by magnetron co-sputtering. MATERIALS LETTERS, 277. ISSN 0167-577X

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Official URL: https://doi.org/10.1016/j.matlet.2020.128306

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika
SWORD Depositor:	MTMT SWORD
Depositing User:	MTMT SWORD
Date Deposited:	09 Sep 2020 13:42
Last Modified:	09 Sep 2020 13:42
URI:	http://real.mtak.hu/id/eprint/112866

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