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Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Hartmann, Peter and Wang, Li and Nösges, K. and Berger, Birk and Wilczek, Sebastian and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Juhász, Zoltán and Donkó, Zoltán and Derzsi, Aranka and Eunwoo, Lee and Schulze, Julian (2020) Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology, 29. 075014. ISSN 0963-0252 ; ESSN: 1361-6595

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: Dr Aranka Derzsi
Date Deposited: 28 Sep 2020 08:06
Last Modified: 28 Sep 2020 08:06
URI: http://real.mtak.hu/id/eprint/114986

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