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Iron silicides formation on Si (100) and (111) surfaces through theoretical modeling of sputtering and annealing

Chepkasov, I. V. and Baidyshev, V. S. and Sukhanova, E. V. and Visotin, M. A. and Süle, P. and Popov, Z. I. (2020) Iron silicides formation on Si (100) and (111) surfaces through theoretical modeling of sputtering and annealing. APPLIED SURFACE SCIENCE, 527. pp. 1-9. ISSN 0169-4332

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Item Type: Article
Subjects: Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 06 Jan 2021 09:58
Last Modified: 15 Oct 2022 23:15
URI: http://real.mtak.hu/id/eprint/119175

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