Hegedüs, Nikolett and Balázsi, Katalin and Balázsi, Csaba (2021) Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications. MATERIALS, 14 (19). pp. 1-21. ISSN 1996-1944
|
Text
materials-Review_Hegedus.pdf Available under License Creative Commons Attribution. Download (1MB) | Preview |
Official URL: https://doi.org/10.3390/ma14195658
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD04 Organic chemistry / szerves kémia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 29 Sep 2021 07:48 |
| Last Modified: | 29 Sep 2021 07:48 |
| URI: | http://real.mtak.hu/id/eprint/131301 |
Actions (login required)
 |
Edit Item |
