Development of Microfluidic Cell for Liquid Phase Layer Deposition Tracking

Renkó, József Bálint and Bonyár, Attila and Szabó, Péter János (2020) Development of Microfluidic Cell for Liquid Phase Layer Deposition Tracking. ACTA MATERIALIA TRANSYLVANICA (EN), 3 (2). pp. 94-97. ISSN 2601-8799

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Abstract

This paper shows how microfluidic tools can be used for up-to-date microstructural investigations based on thin film deposition. The construction and production methods of such measuring procedures are introduced, and their application in ellipsometric investigations is shown. By using these tools, the researchers provide the possibility to observe and document the effects of certain fine structural processes in the development of the final microstructure. This paper describes two specific application areas of such microfluidics cells. Microfluidics cells can be used together with both optical microscopy and spectroscopic ellipsometry to understand previously unexplored microstructural changes.

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