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On-line monitoring of solar cell module production by ellipsometry technique

Fried, Miklós (2014) On-line monitoring of solar cell module production by ellipsometry technique. THIN SOLID FILMS, 571. pp. 345-355. ISSN 0040-6090

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Abstract

Non-destructive analysing tools are needed at all s tages of thin film photovoltaic (PV) development, a nd on production lines. In thin film PV, layer thicknesse s, micro-structure, composition, layer optical prop erties, and their uniformity (because each elementary cell is c onnected electrically in series within a big panel) serve as an important starting point in the evaluation of the p erformance of the cell or module. An important focu s is to express the dielectric functions of each component material in terms of a handful of wavelength indepe ndent parameters whose variation can cover all process va riants of that material. With the resulting databas e, spectroscopic ellipsometry coupled with multilayer analysis can be developed for on-line point-by-poin t mapping and on-line line-by-line imaging. This work tries to review the investigations of dif ferent types of PV-layers (anti-reflective coating, transparent-conductive oxide (TCO), multi-diode-str ucture, absorber and window layers) showing the exi sting dielectric function databases for the thin film com ponents of CdTe, CIGS, thin Si, and TCO layers. Off-line point-by-point mapping can be effective fo r characterization of non-uniformities in full scal e PV panels in developing labs but it is slow in the on- line mode when only 15 points can be obtained (with in 1 min) as a 120 cm long panel moves by the mapping station . In the last years [M. Fried et al, Thin Solid Films 519 , 2730 (2011)], instrumentation was developed that pr ovides a line image of spectroscopic ellipsometry ( wl=350- 1000 nm) data. Upto now a single 30 point line imag e can be collected in 10 s over a 15 cm width of PV material. This year we are building a 30 and a 60 c m width expanded beam ellipsometer the speed of whi ch will be increased by 10X. Then 1800 points can be mapped in a 1 min traverse of a 60*120 cm PV panel or fle xible roll-to-roll substrate.

Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 03 Jan 2015 14:52
Last Modified: 03 Jan 2015 14:52
URI: http://real.mtak.hu/id/eprint/19818

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