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Fourier ellipsometry - An ellipsometric approach to Fourier scatterometry

Petrik, Péter and Kumar, N. and Fried, Miklós and Fodor, Bálint and Juhász, György (2015) Fourier ellipsometry - An ellipsometric approach to Fourier scatterometry. JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 10. p. 15002. ISSN 1990-2573

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika > QC02 Optics / fénytan
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 19 Jun 2015 11:30
Last Modified: 19 Jun 2015 11:30
URI: http://real.mtak.hu/id/eprint/24879

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