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Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Petrik, Péter and Fodor, Bálint and Agócs, Emil and Kozma, Péter and Nádor, Judit and Juhász, György and Major, Csaba (2015) Methods for optical modeling and cross-checking in ellipsometry and scatterometry. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9526. pp. 1-11. ISSN 0277-786X (Unpublished)

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika > QC02 Optics / fénytan
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 12 Oct 2015 08:45
Last Modified: 13 Oct 2015 07:15
URI: http://real.mtak.hu/id/eprint/29701

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