Fine-tuning of gas sensitivity by modification of nano-crystalline WO<inf>3</inf> layer morphology

Takács, Máté and Dücső, Csaba and Csikósné Pap, Andrea Edit (2015) Fine-tuning of gas sensitivity by modification of nano-crystalline WO<inf>3</inf> layer morphology. SENSORS AND ACTUATORS B-CHEMICAL, 221. pp. 281-289. ISSN 0925-4005

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Abstract

Abstract The effect of WO<inf>3</inf> nano-crystal characteristic size and layer morphology on gas sensitive properties was investigated in order to define the optimum preparation process. WO<inf>3</inf> layers were synthesized by hydrothermal acidic precipitation method using different chemicals and reactive sputtering as reference. Micro-hotplate based conductivity type devices were fabricated and the sensitivity on NH<inf>3</inf> up to 100 ppm was measured in the temperature range of 140-240°C. The measurements revealed that the characteristic size of the WO<inf>3</inf> nano-crystal plays primary role, but layer morphology opens the way towards extended measuring range. The nano-rod structures operated at 220°C exhibit the best sensing characteristics in terms of sensitivity and stability over wide range of relative humidity. © 2015 Elsevier B.V.

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