Fried, Miklós and Major, Csaba and Juhász, György and Petrik, Péter and Horváth, Zoltán György (2015) Expanded beam speetro-ellipsometry for big area on-line monitoring. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9525. pp. 1-12. ISSN 0277-786X
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ExpandedSPIE_9525_64_Fried_kezirat_u.pdf Download (3MB) | Preview |
Official URL: http://dx.doi.org/10.1117/12.2184713
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 05 Jan 2016 12:57 |
| Last Modified: | 05 Jan 2016 12:57 |
| URI: | http://real.mtak.hu/id/eprint/31763 |
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