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Determination of migration of ion-implanted Ar and Zn in silica by backscattering spectrometry

Szilágyi, Edit and Bányász, István and Kótai, Endre and Németh, Attila and Major, Csaba and Fried, Miklós and Battistig, Gábor (2015) Determination of migration of ion-implanted Ar and Zn in silica by backscattering spectrometry. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 170 (3). pp. 229-237. ISSN 1042-0150

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 05 Jan 2016 12:27
Last Modified: 05 Jan 2016 12:27
URI: http://real.mtak.hu/id/eprint/31764

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