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Spectroellipsometric Characterization of Sputtered Silicon Nitride Films Using Two Different Dispersion Relations

Lohner, Tivadar and Serényi, Miklós and Petrik, Péter (2016) Spectroellipsometric Characterization of Sputtered Silicon Nitride Films Using Two Different Dispersion Relations. INTERNATIONAL JOURNAL OF NEW HORIZONS IN PHYSICS, 3 (1). pp. 7-10. ISSN 2314-4564

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 06 May 2016 06:55
Last Modified: 06 May 2016 06:55
URI: http://real.mtak.hu/id/eprint/35163

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