Coating and functionalization of high density ion track structures by atomic layer deposition

Mättö, Laura and Szilágyi, Imre Miklós and Laitinen, Mikko and Ritala, Mikko and Leskelä, Markku (2016) Coating and functionalization of high density ion track structures by atomic layer deposition. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 832. pp. 254-258. ISSN 0168-9002

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Abstract

In this study flexible TiO 2 coated porous Kapton membranes are presented having electron multiplication properties. 800 nm crossing pores were fabricated into 50  m thick Kapton membranes using ion track technology and chemical etching. Consecutively, 50 nm TiO 2 films were deposited i nto the pores of the Kapton membranes by atomic layer deposition using Ti( i OPr) 4 and water as precursors at 250 °C. The TiO 2 films and coated membranes were studied by scanning electro n microscopy (SEM), X - ray diffraction (XRD) and X - ray reflectometry (XRR). Au metal electrod e fabrication onto both sides of the coated foils was achieved by electron beam evaporation. The electron multipliers were obtained by joining 3 two coated membranes separated by a conductive spacer. The results show that electron multiplication can be achie ved using ALD - coated flexible ion track polymer foils .

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