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Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Boyadjiev, Stefan Ivanov and Georgieva, V. and Yordanov, R. and Raicheva, Z. and Szilágyi, Imre Miklós (2016) Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors. APPLIED SURFACE SCIENCE, 387. pp. 1230-1235. ISSN 0169-4332

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Item Type: Article
Subjects: Q Science / természettudomány > QD Chemistry / kémia > QD01 Analytical chemistry / analitikai kémia
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 06 Sep 2016 11:18
Last Modified: 06 Sep 2016 11:19
URI: http://real.mtak.hu/id/eprint/39347

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