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AFM characterization of the shape of surface structures with localization factor

Bonyár, Attila (2016) AFM characterization of the shape of surface structures with localization factor. MICRON, 87. pp. 1-9. ISSN 0968-4328

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Item Type: Article
Subjects: T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 05 Oct 2016 05:00
Last Modified: 05 Oct 2016 05:00
URI: http://real.mtak.hu/id/eprint/41365

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