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Characterization of polysilicon thin films using in situ and ex situ spectroscopic ellipsometry

Petrik, Péter (1999) Characterization of polysilicon thin films using in situ and ex situ spectroscopic ellipsometry. PhD thesis, Budapesti Műszaki Egyetem ; MTA MFA.

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Item Type: Thesis (PhD)
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: Andrea Bolgár
Date Deposited: 15 Jul 2013 14:20
Last Modified: 05 Apr 2023 06:26
URI: http://real.mtak.hu/id/eprint/5953

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