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CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

Szívós, János and Pothorszky, Szilárd László and Soltys, Jan and Serényi, Miklós and An, Hongyu and Deák, András and Sáfrán, György (2017) CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media. APPLIED SURFACE SCIENCE. ISSN 0169-4332 (In Press)

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Item Type: Article
Uncontrolled Keywords: Ferromagnetic thin films; Ordered nanostructures; RF plasma etching; Langmuir-Blodgett film; Nanopatterning
Subjects: Q Science / természettudomány > QC Physics / fizika
T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 29 Nov 2017 08:23
Last Modified: 29 Nov 2017 08:23
URI: http://real.mtak.hu/id/eprint/70636

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