Szívós, János and Pothorszky, Szilárd László and Soltys, Jan and Serényi, Miklós and An, Hongyu and Deák, András and Sáfrán, György (2017) CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media. APPLIED SURFACE SCIENCE. ISSN 0169-4332 (In Press)
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Official URL: https://doi.org/10.1016/j.apsusc.2017.11.062
Item Type: | Article |
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Uncontrolled Keywords: | Ferromagnetic thin films; Ordered nanostructures; RF plasma etching; Langmuir-Blodgett film; Nanopatterning |
Subjects: | Q Science / természettudomány > QC Physics / fizika T Technology / alkalmazott, műszaki tudományok > T2 Technology (General) / műszaki tudományok általában |
SWORD Depositor: | MTMT SWORD |
Depositing User: | MTMT SWORD |
Date Deposited: | 29 Nov 2017 08:23 |
Last Modified: | 29 Nov 2017 08:23 |
URI: | http://real.mtak.hu/id/eprint/70636 |
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