Technology of ultralong deep brain fluidic microelectrodes combined with etching-before-grinding

Fekete, Zoltán (2015) Technology of ultralong deep brain fluidic microelectrodes combined with etching-before-grinding. MICROSYSTEM TECHNOLOGIES, 21 (2). pp. 341-344. ISSN 0946-7076

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Abstract

This paper presents a combined fabrication technique that is based on some recent advances in silicon microengineering. Buried microchannels in ultralong silicon microelectrodes thinned by etching-before grinding technology offers novel functional microdevices in the field of neural interfaces. Providing injection, sampling and electrical recording-all integrated monolithically in a long and subsequently thinned silicon microelectrode-extends translational research in fundamental neuroscience due to reduced microelectrode dimensions and functionality like stimulation and recording in deep brain region of cats or apes. © 2013 Springer-Verlag Berlin Heidelberg.

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