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Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer CrAlYN/CrN physical vapor deposition coatings

Sáfrán, György and Reinhard, C. and Ehiasarian, AP. and Barna B., Péter and Székely, Lajos and Geszti, Olga and Hovsepian, P. Eh. (2009) Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer CrAlYN/CrN physical vapor deposition coatings. JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A-VACUUM SURFACES AND FILMS, 27 (2). pp. 174-182. ISSN 0734-2101

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 14 Feb 2019 09:39
Last Modified: 14 Feb 2019 09:39
URI: http://real.mtak.hu/id/eprint/91288

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