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Examination of nanocrystalline TiC/amorphous C deposited thin films

Oláh, Nikolett and Veres, Miklós and Sulyok, Attila and Menyhárd, Miklós and Gubicza, Jenő and Balázsi, Katalin (2014) Examination of nanocrystalline TiC/amorphous C deposited thin films. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 34 (14). pp. 3421-3425. ISSN 0955-2219

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Abstract

The relationship between structural, chemical and mechanical properties of nanocrystalline TiC / amorphous C thin films was studied. Thin films were deposited by DC magnetron sputtering on oxidized silicon substrates in argon at 25 C° and 0.25 Pa. The input power of the carbon target was 150 W, the input power of the titanium target was varied between 15 and 50 W. It was found that all thin films consist of a few nanosized columnar TiC crystallites embedded in carbon matrix. The average size of TiC crystallites and the thickness of the carbon matrix have been found to correlate with Ti content. The mechanical properties of the films have been strictly dependent on their structure. The highest values of the nanohardness (~ 66 GPa) and Young's modulus (~ 401 GPa) were observed for the film with the highest TiC content which was prepared at 50 W of Ti target.

Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 25 Jan 2014 19:40
Last Modified: 24 May 2016 17:40
URI: http://real.mtak.hu/id/eprint/9200

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