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Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms

Derzsi, Aranka and Horváth, Benedek and Korolov, Ihor and Donkó, Zoltán and Schulze, Julian (2019) Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms. JOURNAL OF APPLIED PHYSICS, 126. 043303. ISSN 0021-8979

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: Dr Aranka Derzsi
Date Deposited: 13 Sep 2019 10:08
Last Modified: 30 Jul 2020 23:15
URI: http://real.mtak.hu/id/eprint/99210

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