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Items where Author is "Derzsi, A."

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Number of items: 3.

Article

Schüngel, E. and Donkó, Zoltán and Hartmann, P. and Derzsi, A. and Korolov, I. and Schulze, J. (2015) Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring. Plasma Sources Science and Technology, 24 (4). pp. 1-7. ISSN 0963-0252 ; ESSN: 1361-6595

Schüngel, E. and Brandt, S. and Donkó, Zoltán and Korolov, I. and Derzsi, A. and Schulze, J. (2015) Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas. Plasma Sources Science and Technology, 24 (4). pp. 1-19. ISSN 0963-0252 ; ESSN: 1361-6595

Schulze, J. and Donkó, Zoltán and Derzsi, A. and Korolov, I. and Schuengel, E. (2015) The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas. Plasma Sources Science and Technology, 24 (1). pp. 1-14. ISSN 0963-0252 ; ESSN: 1361-6595

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