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Items where Author is "Hamaguchi, Satoshi"

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Donkó, Zoltán and Derzsi, Aranka and Vass, Máté and Schulze, Julian and Schuengel, Edmund and Hamaguchi, Satoshi (2018) Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms. Plasma Sources Science and Technology, 27. p. 104008. ISSN 0963-0252 ; ESSN: 1361-6595

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