Molnár, S. and Bohdan, R. and Nagy, Gy. and Rajta, I. and Illés, L. and Csik, A. and Kökényesi, S. (2019) Direct surface patterning of amorphous chalcogenide layers with high- energy H+ and He+ ion beams. JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS, 30 (16). pp. 15331-15338. ISSN 0957-4522 (print); 1573-482X (online)
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Molnar2019_Article_DirectSurfacePatterningOfAmorp.pdf Available under License Creative Commons Attribution. Download (1MB) | Preview |
Official URL: http://doi.org/10.1007/s10854-019-01906-9
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 16 Dec 2019 14:52 |
| Last Modified: | 16 Dec 2019 14:52 |
| URI: | http://real.mtak.hu/id/eprint/104364 |
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