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Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon

Horváth, Benedek and Derzsi, Aranka and Schulze, Julian and Korolov, Ihor and Hartmann, Peter and Donkó, Zoltán (2020) Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon. Plasma Sources Science and Technology, 29. 055002. ISSN 0963-0252 ; ESSN: 1361-6595

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: Dr Aranka Derzsi
Date Deposited: 28 Sep 2020 08:08
Last Modified: 28 Sep 2020 08:08
URI: http://real.mtak.hu/id/eprint/114984

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