Khánh, Nguyen Quoc and Radó, János and Horváth, Zsolt Endre and Soleimani, S. and Oyunbolor, B. and Volk, János (2020) The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films. JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS, 31 (24). pp. 22833-22843. ISSN 0957-4522
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Official URL: https://doi.org/10.1007/s10854-020-04810-9
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 23 Dec 2020 11:44 |
| Last Modified: | 23 Dec 2020 11:44 |
| URI: | http://real.mtak.hu/id/eprint/118823 |
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