Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy

Rim, Min-Ho and Agócs, Emil and Dixson, Ronald and Kavuri, Prem and Vladár, András E. and Attota, Ravi Kiran (2020) Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy. JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B: NANOTECHNOLOGY AND MICROELECTRONICS, 38 (5). pp. 1-6. ISSN 2166-2746 (print); 2166-2754 (online)

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Official URL: https://doi.org/10.1116/6.0000352

Item Type:	Article
Subjects:	Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor:	MTMT SWORD
Depositing User:	MTMT SWORD
Date Deposited:	06 Jan 2021 09:47
Last Modified:	06 Jan 2021 09:47
URI:	http://real.mtak.hu/id/eprint/119196

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