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Highly conductive epitaxial ZnO layers deposited by atomic layer deposition

Baji, Zsófia and Lábadi, Zoltán and Molnár, György and Pécz, Béla and Vad, K. and Horváth, Zsolt Endre and Volk, János (2014) Highly conductive epitaxial ZnO layers deposited by atomic layer deposition. THIN SOLID FILMS, 562. pp. 485-489. ISSN 0040-6090

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 23 Jun 2014 12:50
Last Modified: 23 Jun 2014 12:52
URI: http://real.mtak.hu/id/eprint/13307

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