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Electron scattering mechanisms in Cu-Mn films for interconnect applications

Misják, Fanni and Nagy, K. H. and Lobotka, P . and Radnóczi, György (2014) Electron scattering mechanisms in Cu-Mn films for interconnect applications. JOURNAL OF APPLIED PHYSICS, 116 (8). 083507-1-083507-8. ISSN 0021-8979

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 05 Sep 2014 09:39
Last Modified: 05 Sep 2014 09:39
URI: http://real.mtak.hu/id/eprint/14446

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