Lohner, Tivadar and Németh, Attila and Zolnai, Zsolt and Kalas, Benjamin and Romanenko, Alekszej and Nguyen Quoc, Khánh and Szilágyi, Edit and Kótai, Endre and Agócs, Emil and Tóth, Zsolt and Budai, Judit and Petrik, Péter and Fried, Miklós and Bársony, István and Gyulai, József (2022) Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 152. No. 107062. ISSN 1369-8001
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1-s2.0-S1369800122005893-main.pdf Available under License Creative Commons Attribution. Download (4MB) | Preview |
Official URL: http://doi.org/10.1016/j.mssp.2022.107062
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 05 Sep 2022 11:11 |
| Last Modified: | 05 Sep 2022 11:11 |
| URI: | http://real.mtak.hu/id/eprint/147703 |
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