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Gas sensing properties of very thin TiO2 films prepared by atomic layer deposition (ALD)

Boyadjiev, S. and Georgieva, V. and Vergov, L. and Baji, Zs. and Gáber, F. and Szilágyi, Imre Miklós (2014) Gas sensing properties of very thin TiO2 films prepared by atomic layer deposition (ALD). JOURNAL OF PHYSICS-CONFERENCE SERIES, 559. 012013. ISSN 1742-6588

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 26 Jan 2015 07:52
Last Modified: 26 Jan 2015 07:52
URI: http://real.mtak.hu/id/eprint/20920

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