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Characterization of sputtered aluminum oxide films using spectroscopic ellipsometry

Lohner, Tivadar and Serényi, Miklós and Petrik, Péter (2015) Characterization of sputtered aluminum oxide films using spectroscopic ellipsometry. INTERNATIONAL JOURNAL OF NEW HORIZONS IN PHYSICS, 2 (1). pp. 1-4. ISSN 2314-4564

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 17 Jun 2015 12:08
Last Modified: 17 Jun 2015 12:08
URI: http://real.mtak.hu/id/eprint/24846

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