Lohner, Tivadar and Serényi, Miklós and Petrik, Péter (2015) Characterization of sputtered aluminum oxide films using spectroscopic ellipsometry. INTERNATIONAL JOURNAL OF NEW HORIZONS IN PHYSICS, 2 (1). pp. 1-4. ISSN 2314-4564
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Item Type: | Article |
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Subjects: | Q Science / természettudomány > QC Physics / fizika |
SWORD Depositor: | MTMT SWORD |
Depositing User: | MTMT SWORD |
Date Deposited: | 17 Jun 2015 12:08 |
Last Modified: | 17 Jun 2015 12:08 |
URI: | http://real.mtak.hu/id/eprint/24846 |
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