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Porosity and thickness characterization of porous Si and oxidized porous Si layers – an ultraviolet-visible-mid infrared ellipsometry study

Fodor, Bálint and Agócs, Emil and Bardet, Benjamin and Defforge, Thomas and Cayrel, Frederic and Fried, Miklós and Petrik, Péter (2016) Porosity and thickness characterization of porous Si and oxidized porous Si layers – an ultraviolet-visible-mid infrared ellipsometry study. MICROPOROUS and Mesoporous Materials, in pre. in press. ISSN 1387-1811

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Item Type: Article
Uncontrolled Keywords: Measurement of porosity; OXIDATION; Porous silicon layer; Electrochemical etching; Infrared ellipsometry
Subjects: Q Science / természettudomány > QC Physics / fizika
Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 24 Feb 2016 08:53
Last Modified: 24 Feb 2016 08:53
URI: http://real.mtak.hu/id/eprint/33763

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