Fodor, Bálint and Agócs, Emil and Bardet, Benjamin and Defforge, Thomas and Cayrel, Frederic and Fried, Miklós and Petrik, Péter (2016) Porosity and thickness characterization of porous Si and oxidized porous Si layers – an ultraviolet-visible-mid infrared ellipsometry study. MICROPOROUS and Mesoporous Materials, in pre. in press. ISSN 1387-1811
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Official URL: http://dx.doi.org/10.1016/j.micromeso.2016.02.039
| Item Type: | Article |
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| Uncontrolled Keywords: | Measurement of porosity; OXIDATION; Porous silicon layer; Electrochemical etching; Infrared ellipsometry |
| Subjects: | Q Science / természettudomány > QC Physics / fizika Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 24 Feb 2016 08:53 |
| Last Modified: | 24 Feb 2016 08:53 |
| URI: | http://real.mtak.hu/id/eprint/33763 |
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