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Comparison in formation, optical properties and applicability of DC magnetron and RF sputtered aluminum oxide films

Serényi, Miklós and Lohner, Tivadar and Sáfrán, György and Szívós, János (2016) Comparison in formation, optical properties and applicability of DC magnetron and RF sputtered aluminum oxide films. VACUUM, 128. pp. 213-218. ISSN 0042-207X

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 06 May 2016 07:05
Last Modified: 06 May 2016 07:15
URI: http://real.mtak.hu/id/eprint/35164

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