Serényi, Miklós and Lohner, Tivadar and Sáfrán, György and Szívós, János (2016) Comparison in formation, optical properties and applicability of DC magnetron and RF sputtered aluminum oxide films. VACUUM, 128. pp. 213-218. ISSN 0042-207X
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Lohner_Comparision_1_s2.0_S0042207X16300768_main_u.pdf Restricted to Repository staff only Download (1MB) | Request a copy |
Official URL: http://dx.doi.org/10.1016/j.vacuum.2016.03.033
Item Type: | Article |
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Subjects: | Q Science / természettudomány > QC Physics / fizika |
SWORD Depositor: | MTMT SWORD |
Depositing User: | MTMT SWORD |
Date Deposited: | 06 May 2016 07:05 |
Last Modified: | 06 May 2016 07:15 |
URI: | http://real.mtak.hu/id/eprint/35164 |
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