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Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures

Mayer, M. and Malinský, P. and Schiettekatte, F. and Zolnai, Zsolt (2016) Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 385. pp. 65-73. ISSN 0168-583X

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Item Type: Article
Uncontrolled Keywords: Computer simulation; Ion beam analysis
Subjects: Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 19 Oct 2016 13:32
Last Modified: 19 Oct 2016 13:32
URI: http://real.mtak.hu/id/eprint/41919

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