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Items where Author is "Hultman, L."
Group by: Item Type | No Grouping Jump to: Article Number of items: 2. ArticleSchmidt, S. and Goyenola, C. and Gueorguiev, G. K. and Jensen, J. and Greczynski, G. and Czigány, Zsolt and Hultman, L. (2013) Reactive high power impulse magnetron sputtering of CFx thin films in mixed Ar/CF4 and Ar/C4F8 discharges. THIN SOLID FILMS, 542. pp. 21-30. ISSN 0040-6090 Schmidt, S. and Czigány, Zsolt and Greczynski, G. and Hultman, L. (2012) Ion Mass Spectrometry Investigations of the Discharge during Reactive High Power Pulsed and Direct Current Magnetron Sputtering of Carbon in Ar and Ar/N2. JOURNAL OF APPLIED PHYSICS, 112 (1). 013305. ISSN 0021-8979 |
