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Items where Author is "Roederd, Georg"

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Holfelder, Ina and Beckhoff, Burkhard and Fliegauf, Rolf and Hönicke, Philipp and Nutsch, Andreas and Petrik, Péter and Roederd, Georg and Weser, Jan (2013) Complementary methodologies for thin film characterization in one tool - a novel instrument for 450 mm wafers. JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 28 (4). pp. 549-557. ISSN 0267-9477

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