Atomic layer deposition and annealing of Ga doped ZnO films

Szabó, Zoltán and Volk, János and Horváth, Zsolt Endre and Medveczky, Zsófia and Czigány, Zsolt and Vad, Kálmán and Baji, Zsófia (2019) Atomic layer deposition and annealing of Ga doped ZnO films. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 101. pp. 95-102. ISSN 1369-8001

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Official URL: http://doi.org/10.1016/j.mssp.2019.05.028

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika > QC06 Physics of condensed matter / szilárdtestfizika
SWORD Depositor:	MTMT SWORD
Depositing User:	MTMT SWORD
Date Deposited:	20 Oct 2019 04:51
Last Modified:	20 Oct 2019 04:51
URI:	http://real.mtak.hu/id/eprint/102425

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