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Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films

Lohner, Tivadar and Serényi, Miklós and Basa, D.K. and Nguyen Quoc, Khánh and Nemcsics, Ákos and Petrik, Péter and Turmezei, Péter (2008) Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films. ACTA POLYTECHNICA HUNGARICA, 5 (2). pp. 23-30. ISSN 1785-8860

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Item Type: Article
Subjects: Q Science / természettudomány > QC Physics / fizika
SWORD Depositor: MTMT SWORD
Depositing User: MTMT SWORD
Date Deposited: 22 Feb 2014 07:20
Last Modified: 23 Feb 2014 16:53
URI: http://real.mtak.hu/id/eprint/10332

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