Optimization of co-sputtered CrxAl1−xN thin films for piezoelectric MEMS devices

Soleimani, Saeedeh and Kalas, Benjamin and Horváth, Zsolt Endre and Zolnai, Zsolt and Czigány, Zsolt and Németh, Attila and Petrik, Péter and Volk, János (2020) Optimization of co-sputtered CrxAl1−xN thin films for piezoelectric MEMS devices. JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS, 31. ISSN 0957-4522 (print); 1573-482X (online)

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Official URL: http://doi.org/10.1007/s10854-020-03260-7

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia
SWORD Depositor:	MTMT SWORD
Depositing User:	MTMT SWORD
Date Deposited:	11 May 2020 09:55
Last Modified:	11 May 2020 09:55
URI:	http://real.mtak.hu/id/eprint/108669

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