Derzsi, Aranka and Horváth, Benedek and Donkó, Zoltán and Schulze, Julian (2020) Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms. Plasma Sources Science and Technology, 29. 074001. ISSN 0963-0252 ; ESSN: 1361-6595
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Official URL: https://doi.org/10.1088/1361-6595/ab9156
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| Depositing User: | Dr Aranka Derzsi |
| Date Deposited: | 28 Sep 2020 08:04 |
| Last Modified: | 28 Sep 2020 08:05 |
| URI: | http://real.mtak.hu/id/eprint/114988 |
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