Rim, Min-Ho and Agócs, Emil and Dixson, Ronald and Kavuri, Prem and Vladár, András E. and Attota, Ravi Kiran (2020) Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy. JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B: NANOTECHNOLOGY AND MICROELECTRONICS, 38 (5). pp. 1-6. ISSN 2166-2746 (print); 2166-2754 (online)
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10.11166.0000352.pdf Restricted to Repository staff only Download (3MB) |
Official URL: https://doi.org/10.1116/6.0000352
Item Type: | Article |
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Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia |
SWORD Depositor: | MTMT SWORD |
Depositing User: | MTMT SWORD |
Date Deposited: | 06 Jan 2021 09:47 |
Last Modified: | 06 Jan 2021 09:47 |
URI: | http://real.mtak.hu/id/eprint/119196 |
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