Baji, Zsófia and Lábadi, Zoltán and Molnár, György and Pécz, Béla and Vad, K. and Horváth, Zsolt Endre and Volk, János (2014) Highly conductive epitaxial ZnO layers deposited by atomic layer deposition. THIN SOLID FILMS, 562. pp. 485-489. ISSN 0040-6090
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Highly conductive epitaxial ZnO layers deposited by ALD rev.pdf Download (562kB) | Preview |
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 23 Jun 2014 12:50 |
| Last Modified: | 23 Jun 2014 12:52 |
| URI: | http://real.mtak.hu/id/eprint/13307 |
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