Magnetic Attenuation of the Self-Excitation of the Plasma Series Resonance in Low-Pressure Capacitively Coupled Discharges

Wang, Li and Vass, Máté and Donkó, Zoltán and Hartmann, Péter and Derzsi, Aranka and Song, Yuan-Hong and Schulze, Julian (2021) Magnetic Attenuation of the Self-Excitation of the Plasma Series Resonance in Low-Pressure Capacitively Coupled Discharges. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 30 (10). pp. 1-6. ISSN 0963-0252 (print); 1361-6595 (online)

Text
PSST_2021_Wang_Magnetic_letter.pdf
Restricted to Registered users only
Download (1MB)

Official URL: https://doi.org/10.1088/1361-6595/ac287b

Item Type:	Article
Subjects:	Q Science / természettudomány > QC Physics / fizika
Depositing User:	Dr Aranka Derzsi
Date Deposited:	28 Oct 2021 13:33
Last Modified:	28 Oct 2021 13:33
URI:	http://real.mtak.hu/id/eprint/133116

Actions (login required)

Edit Item

Repository of the Academy's Library is powered by EPrints 3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.