Schilirò, Emanuela and Giannazzo, Filippo and Di Franco, Salvatore and Greco, Giuseppe and Fiorenza, Patrick and Roccaforte, Fabrizio and Prystawko, Paweł and Kruszewski, Piotr and Leszczynski, Mike and Cora, Ildikó and Pécz, Béla and Fogarassy, Zsolt and Lo Nigro, Raffaella (2021) Highly Homogeneous Current Transport in Ultra-Thin Aluminum Nitride (AlN) Epitaxial Films on Gallium Nitride (GaN) Deposited by Plasma Enhanced Atomic Layer Deposition. NANOMATERIALS, 11 (12). pp. 1-10. ISSN 2079-4991
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nanomaterials-11-03316.pdf Available under License Creative Commons Attribution. Download (2MB) | Preview |
Official URL: https://doi.org/10.3390/nano11123316
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QD Chemistry / kémia > QD02 Physical chemistry / fizikai kémia |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 07 Dec 2021 15:36 |
| Last Modified: | 07 Dec 2021 15:36 |
| URI: | http://real.mtak.hu/id/eprint/134292 |
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