Fabrication of optical channel waveguides in crystals and glasses using macro- and micro ion beams

Bányász, István and Rajta, István and Nagy, G. U. L. and Zolnai, Zsolt and Havranek, V. and Veres, Miklós (2014) Fabrication of optical channel waveguides in crystals and glasses using macro- and micro ion beams. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 331. pp. 157-162. ISSN 0168-583X

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Active and passive optical waveguides are fundamental elements in modern telecommunications systems. A great number of optical crystals and glasses were identified and are used as good optoelectronic materials. However, fabrication of waveguides in some of those materials remains still a challenging task due to their susceptibility to mechanical or chemical damages during processing. Researches were initiated on ion beam fabrication of optical waveguides in tellurite glasses. Channel waveguides were written in Er:TeO2–WO3 glass through a special silicon mask using 1.5 MeV N+ irradiation. This method was improved by increasing N+ energy to 3.5 MeV to achieve confinement at the 1550 nm wavelength, too. An alternative method, direct writing of the channel waveguides in the tellurite glass using focussed beams of 6–11 MeV C3+ and C5+ and 5 MeV N3+, has also been developed. Channel waveguides were fabricated in undoped eulytine-(Bi4Ge3O12) and sillenite type (Bi12GeO20) bismuth germanate crystals using both a special silicon mask and a thick SU8 photoresist mask and 3.5 MeV N+ irradiation. The waveguides were studied by phase contrast and interference microscopy and micro Raman spectroscopy. Guiding properties were checked by the end fire method.

Item Type: Article
Uncontrolled Keywords: Channel optical waveguides Ion beam irradiation Focussed ion beam Er-doped tungsten-tellurite glass Bismuth germanate Micro Raman spectroscopy
Subjects: Q Science / természettudomány > QC Physics / fizika > QC06 Physics of condensed matter / szilárdtestfizika
Depositing User: MTMT SWORD
Date Deposited: 17 Jul 2014 08:17
Last Modified: 27 Nov 2017 10:33

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