Horváth, Zsolt József and Basa, Péter and Petrik, Péter and Dücső, Csaba and Jászi, T. and Dobos, László and Tóth, Lajos and Lohner, Tivadar and Pécz, Béla and Fried, Miklós (2005) Si nanocrystals in sandwiched SiNx structures. In: Semiconductor nanocrystals. MTA MFA, Budapest, pp. 417-420. ISBN 963-7371-18-4
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Abstract
The structure and composition of multilayered SiNx structures prepared by low pressure chemical vapour deposition were studied by cross-sectional transmission electron microscopy and spectroscopic ellipsometry. Using appropriate deposition parameters and post deposition annealing, well separated Si nanocrystals were obtained with avarage grain size of 8-10 nm.
| Item Type: | Book Section |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 19 Aug 2014 06:48 |
| Last Modified: | 19 Aug 2014 06:48 |
| URI: | http://real.mtak.hu/id/eprint/14237 |
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