Fekete, Zoltán and Horváth, Á. and Bérces, Zs. and Pongrácz, Anita (2014) Black poly-silicon: a nanostructured seed layer for sensor applications. SENSORS AND ACTUATORS A-PHYSICAL, 216. pp. 277-286. ISSN 0924-4247
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Official URL: http://www.sciencedirect.com/science/article/pii/S...
| Item Type: | Article |
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| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 25 Aug 2014 09:39 |
| Last Modified: | 25 Aug 2014 09:39 |
| URI: | http://real.mtak.hu/id/eprint/14283 |
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