Schmidt, S. and Czigány, Zsolt and Greczynski, G. and Hultman, L. (2012) Ion Mass Spectrometry Investigations of the Discharge during Reactive High Power Pulsed and Direct Current Magnetron Sputtering of Carbon in Ar and Ar/N2. JOURNAL OF APPLIED PHYSICS, 112 (1). 013305. ISSN 0021-8979
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JAP112(2012)013305_SusannPlasma.pdf Download (2MB) | Preview |
Official URL: http://liu.diva-portal.org/smash/get/diva2:548258/...
| Item Type: | Article |
|---|---|
| Subjects: | Q Science / természettudomány > QC Physics / fizika |
| SWORD Depositor: | MTMT SWORD |
| Depositing User: | MTMT SWORD |
| Date Deposited: | 15 Sep 2014 13:18 |
| Last Modified: | 15 Sep 2014 13:18 |
| URI: | http://real.mtak.hu/id/eprint/15010 |
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