Experiments with Femtosecond Laser on Monocrystalline Silicon

Maloveczky, Anna and Windisch, Márk and Szabó, Dávid and Buza, Gábor and Ugi, Dávid and Veres, Mikló and Rigó, István and Fürjes, Péte and Hakkel, Orsolya (2020) Experiments with Femtosecond Laser on Monocrystalline Silicon. ACTA MATERIALIA TRANSYLVANICA (EN), 3 (2). pp. 86-89. ISSN 2601-8799

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Abstract

Experiments were performed with femtosecond laser on monocrystalline silicon for different application fields. The small focal spot diameter, the ultra-short pulse length, and the high energy density opens new ways in material processing; the treated material will have smaller heat affected zone (HAZ), and allow more precise, higher quality material processing. Micropillars and LIPSS structures were prepared on monocrystalline silicon in our study.

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